TELIC

Chrome Photomask Blanks/Large

Substrates:

Applications:

- SODA LIME
- BOROSILICATE (1737, D263, BOROFLOAT)

- FLAT PANEL DISPLAYS
- PCB TOOLING MASTERS
- MCM MASKS

Substrate Specification

SIZE:

Square or Rectangular shapes
up to 24" or 600mm

THICKNESS:

0.020'' - 0.220'' (0.5mm - 6mm)
(non standard thickness upon request)

SURFACE:

All plates polished on both sides & inspected
to be free of glass defects > 5&microm

FLATNESS:

< 15 µ m / 100mm x 100mm

Film Specification

CHROME:

Vacuum Deposited, DC Sputtered in Class 100 Environment

THICKNESS/
OPTICAL DENSITY:

Standard: 1600Å /O.D.=4.0&plusmn0.3 @ 430mm. Custom Thicknesses up to 5 µ m

REFLECTIVITY:

 

CHROME

ALUMINIUM

LOW

<12% @ 400nm

94%

MID

<33% @400nm

N/A

HI

<55% @400nm

N/A

PHOTORESIST:

Shipley 1800 or AZ 1500 filtered to 0.2 micron at point of use. All widely used positive and negative optical and E-beam resist available.

 

 

Telic Company
24832 Avenue Rockefeller
Valencia, CA 91355

Phone: 661.702.8603
Toll Free: (888) TELICCO
Fax: 661.257.6802
E-mail: telic2000@aol.com
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