E Beam Photomask Blanks
- Reticles, Master Grade
SIZE: thickness Squares 2" through 7"
THICKNESS: 0.010" - 0.220" (0.50mm - 6mm) non standard thickness is available upon request
SURFACE: All plates are polished on both sides and inspected to be free of glass defects > 2 microns
FLATNESS: ≤15 microns
CHROME: Vacuum Deposited, DC Sputtered in Class 100 Environment
THICKNESS/OPTICAL DENSITY: Standard: 1100Å ± 10% / O.D. = 2.8 ± 0.2 @ 530mm.
Custom Thicknesses up to 5 µm
8% @ 450nm
CLICK HERE for Chrome Reflectivity Graph
Etchable in all conventional Wet Etch systems
Plasma Grade recommended for Dry Etch systems
PMMA, AR N7700 Negative, SU-8
E-Beam Photomask Blank Information Sheet (PDF)
Telic Company - 28478 Westinghouse Place - Valencia, California 91355 - P: 661.702.8603 - F: 661.257.6802 - E: sales@TelicCompany.com