SIZE: Square or Rectangular Shapes up to 50" or 1270mm
THICKNESS: 0.020" - 0.220" (0.5mm - 6mm)
(non standard thickness is available upon request)
SURFACE: All Plates are polished on both sides and inspected to be free of glass defects > 5 microns
FLATNESS: <15 microns / 100mm x 100mm
PHOTORESIST SPECIFICATIONS
TYPE: AZ 1500 Photoresist Standard Thickness available 5300Å, 1 micron, 1.5 microns, 2.5 microns. All widely used positive and negative optical and E-beam resist available.
THICKNESS: 1.0 and 1.5 micron, up to 20 micron available.