TELIC COMPANY

Photomask Blanks - Large


SUBSTRATES:

  • Soda Lime
  • Borosilicate (Eagle, D263, AF32,  Borofloat)

APPLICATIONS:

  • Flat Panel Displays
  • PCB Tooling Masters
  • MCM Masks

SUBSTRATE SPECIFICATIONS

SIZE:  Square or Rectagular Shapes up to 50" or 1270mm

THICKNESS:  0.010" - 0.220" (0.30mm - 6mm) non standard thickness is available upon request

SURFACE:  All plates are polished on both sides and inspected to be free of glass defects > 5 microns

FLATNESS:   <15  µ m / 100mm x100mm


FILM SPECIFICATIONS

CHROME:  Vacuum Deposited, DC Sputtered in Class 100 Environment

THICKNESS/OPTICAL DENSITY: Standard: 1600Å /O.D.=4.0 ± 0.3 @ 530mm.

                                                        Custom Thicknesses up to 5  µ m

REFLECTIVITY:

 

Low Reflective - LRC

8% @ 450nm

Mid Reflective - MRC 33% @ 450nm
High Reflective - HRC >48% @ 450nm
Blue - R632 <5% @ 632nm
Blue/Chrome/Blue - R632/632 <5% @ 632nm Both Sides
Green - R850 <5% @ 850nm
Green/Chrome/Green - R850/850 <5% @ 850nm Both Sides

CLICK HERE for Chrome Reflectivity Graph

 

PROCESS:  Etchable in all conventional Wet Etch systems

                     Plasma Grade recommended for Dry Etch systems

PHOTORESIST:  

5300Å AZ 1500 filtered to 0.045 microns at point of use.  Fringless and Regular Spin Available. 

Custom Photoresist options include all widely used positive and negative optical and E-beam resist available.

Including: AZ MIR701, AZ P4600, AZ 5206, AZ 9260, AZ nLOF 2000, AZ 6615, AZ ECI3027

S1800, HR200, IP3500, IP3600, PMMA, AR N7700, SU-8, LOR A, LOR B, PMGI



Please Contact Us for more information.


Telic Company - 28478 Westinghouse Place - Valencia, California 91355 - P: 661.702.8603 - F: 661.257.6802 - E: sales@TelicCompany.com